Friday, April 17, 2015

Does a process tool running TEOS require a point-of-use gas scrubber?

Yes, TEOS, TEPO is extremely combustible and would require point of use (POU) gas reduction. Normally, these are greater circulation procedures, and require a scrubber to burn these off. Exactly what I have actually seen in the field and usually suggest are Guardians that make use of a

Read more...

No comments:

Post a Comment